4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Trench capacitor

Hui Min Mao

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Method for estimating capacitance of deep trench capacitors

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Method for forming buried plates

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of fabricating shallow trench isolation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Method of forming inter-metal dielectric

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method of metal etching post cleaning

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Profile ID: LFUS-PAI-P-2607684

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