4. Semiconductor device manufacturing: process
  5. Forming schottky junction
  6. Using refractory group metal

Hsiang-Jen Huang

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Reduction of boron diffusivity in pFETs

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Reexamination Certificate

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Salicide formation method

Semiconductor device manufacturing: process – Forming schottky junction – Using refractory group metal
Reexamination Certificate

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