4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Horst Tyrroff

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Method for the production of a self-supporting mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Sputter ions source

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1835515

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