4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. With sample excitation

Hong-Young Chang

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Antenna device for generating inductively coupled plasma

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Apparatus using hybrid coupled plasma

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Method for measuring radical species distribution in plasma and

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
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Profile ID: LFUS-PAI-P-1863478

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