4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Hong-Qiang Lu

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Carbon nanotube memory cell for integrated circuit structure...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Dielectric barrier films for use as copper barrier layers in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Dielectric barrier films for use as copper barrier layers in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Dual layer barrier film techniques to prevent resist poisoning

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Dual layer barrier film techniques to prevent resist poisoning

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2573932

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