4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Hong-Gu Yi

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Method for fabricating vertical channel transistor in...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method for forming contact hole using dry and wet etching...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2376358

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