4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. Amorphous semiconductor

Ho Nyeon Lee

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Method for crystallizing amorphous silicon film

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Method for fabricating single crystal silicon film

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Method for forming polycrystalline silicon film

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
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Method for forming polycrystalline silicon film of...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
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