4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hitoshi Ujimasa

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Active-matrix display device with added capacitance electrode wi

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element
Patent

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Dry etching method of a silicon thin film

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Selective dry etching method of undoped and doped silicon thin f

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Susceptor and surface processing method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Profile ID: LFUS-PAI-P-697091

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