4. Optics: measuring and testing
  5. Inspection of flaws or impurities

Hitoshi Komuro

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Basket in basket conveyor

Conveyors: power-driven – Conveyor section – Bucket
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Circulating body and fixing device

Electrophotography – Image formation – Fixing
Reexamination Certificate

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Defect inspection apparatus for silicon wafer

Optics: measuring and testing – Inspection of flaws or impurities
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Defect inspection apparatus for silicon wafer

Optics: measuring and testing – Inspection of flaws or impurities
Patent

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Defect inspection method and apparatus for silicon wafer

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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