Hitoshi Higurashi

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Charged beam exposure system

Radiant energy – Irradiation of objects or material
Reexamination Certificate

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Charged beam lithography system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Correlation tunnel device

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction
Patent

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Electron beam exposure apparatus

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Manufacturing a circuit element

Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
Reexamination Certificate

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Profile ID: LFUS-PAI-P-593737

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