4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Hisato Katou

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Method for manufacturing thin-film EL device

Electric lamp or space discharge component or device manufacturi – Process – Generating gas or vapor within an envelope – or coating by...
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Method for preparing thin film electro-luminescence element

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-1765928

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