4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Hiroto Takenaka

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Plasma treatment method and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Plasma treatment method and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Plasma treatment method and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Plasma treatment method utilizing an amplitude-modulated high fr

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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