4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Hiroto Kasai

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Electron beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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MEMS device and methods for manufacturing thereof, light...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Transmission electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Transmission electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2226592

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