4. Coating apparatus
  5. Control means responsive to a randomly occurring sensed...
  6. Temperature responsive

Hiroshi Sekihashi

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Chemical vapor deposition apparatus for forming thin film

Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
Patent

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Chemical vapor deposition method for forming thin film

Coating processes – Coating by vapor – gas – or smoke
Patent

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Profile ID: LFUS-PAI-P-1405936

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