Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
Patent
1992-04-29
1993-05-11
Bueker, Richard
Coating apparatus
Control means responsive to a randomly occurring sensed...
Temperature responsive
118708, 118723, 118724, 118725, C23C 1650
Patent
active
052091821
ABSTRACT:
An apparatus for forming, by a chemical vapor deposition process, a thin film of crystals such as diamond on a surface of a heated substrate placed in a reaction vessel. The apparatus has a substrate supporting structure, a heater for heating the substrate by heat conduction or by electric current supplied directly to the substrate, and a cooling device for cooling the substrate. The heater is controlled in accordance with the measured temperature of the substrate so as to accurately maintain the substrate temperature at a constant level.
REFERENCES:
patent: 5099788 (1992-03-01), Ito
Kondoh Eiichi
Mitomo Tohru
Ohta Tomohiro
Otsuka Kenichi
Sekihashi Hiroshi
Bueker Richard
Kawasaki Steel Corporation
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