4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Hideyuki Kakiuchi

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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – With detector
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Electron beam lithography apparatus having device for correcting

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Profile ID: LFUS-PAI-P-549565

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