4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Altering etchability of substrate region by compositional or...

Helmholtz-Zentrum Berlin fuer Materialien und Energie GmbH

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Method of fabricating a field effect transistor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Transistor assembly and method of its fabrication

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
Reexamination Certificate

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