4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Haruhiro Goto

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High-rate dry-etch of indium and tin oxides by hydrogen and halo

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method and apparatus for etching film layers on large substrates

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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