4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Harald F. Okorn-Schmidt

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Etching of silicon nitride

Compositions – Etching or brightening compositions – Inorganic acid containing
Patent

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Etching of silicon nitride

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Patent

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High-dielectric constant insulators for feol capacitors

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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High-dielectric constant insulators for FEOL capacitors

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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High-dielectric constant insulators for FEOL capacitors

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-207332

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