4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hanzhong Xiao

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Method providing an improved bi-layer photoresist pattern

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Methods and apparatus for the optimization of photo resist...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2843138

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