4. Fluid handling
  5. Processes

Hannu Leskinen

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Diaphragm valve for atomic layer deposition

Fluid handling – With heating or cooling of the system – With electric heating element
Reexamination Certificate

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Diaphragm valve for high-temperature precursor supply in...

Fluid handling – With heating or cooling of the system
Reexamination Certificate

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Diaphragm valve with reliability enhancements for atomic...

Fluid handling – With heating or cooling of the system – With electric heating element
Reexamination Certificate

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High-speed diaphragm valve for atomic layer deposition

Fluid handling – Processes
Reexamination Certificate

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Precursor material delivery system for atomic layer deposition

Gas separation: processes – Filtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2821838

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