Fluid handling – With heating or cooling of the system – With electric heating element
Reexamination Certificate
2006-04-04
2006-04-04
Lee, Kevin (Department: 3753)
Fluid handling
With heating or cooling of the system
With electric heating element
C251S331000
Reexamination Certificate
active
07021330
ABSTRACT:
A shut-off type diaphragm valve adapted for use in an atomic layer deposition system includes a valve seat having an annular seating surface that surrounds an inlet of the valve and extends radially therefrom. The seating surface contacts a substantial portion of the first side of a flexible diaphragm when the diaphragm is closed, to facilitate heat transfer and counteract dissipative cooling of the diaphragm, thereby inhibiting condensation of a medium flowing through the valve passage. The seating surface is preferably flat and smooth, to prevent shearing of an elastomeric diaphragm. For a plastic diaphragm, a ring-shaped seating ridge may extend from the seating surface to cause localized permanent deformation of the diaphragm and enhanced sealing, while still allowing a substantial portion of the diaphragm to contact the seating surface for enhanced heat transfer. Valve speed enhancements and other reliability enhancing features are also described.
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Aitchison Bradley J.
Härkönen Kari
Kuosmanen Pekka
Lang Teemu
Leskinen Hannu
Lee Kevin
Planar Systems Inc.
Stoel Rives LLP
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