4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Han-Jan Tao

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Microelectronic device having disposable spacer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Sidewall polymer deposition method for forming a patterned...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Strained channel CMOS device with fully silicided gate...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2756247

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