4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Trench capacitor

Hai-Han Hung

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Method for fabricating a deep trench in a substrate

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method for forming a silicon nitride layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Method for treating the surface of a deep trench

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2440345

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