4. Coating apparatus
  5. Projection or spray type

Gyu-myeung Lee

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Apparatus for spraying photoresist

Coating apparatus – Projection or spray type
Patent

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Photoresist removing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Photoresist suck-back device in manufacturing system for semicon

Fluid sprinkling – spraying – and diffusing – With cleaning means – drip collecting – waste disposal or soil... – Nozzle cleaner – flusher or drainer
Patent

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Profile ID: LFUS-PAI-P-903196

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