Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2005-08-31
2008-10-21
Ackun, Jr., Jacob K (Department: 3728)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S008000, C451S041000
Reexamination Certificate
active
07438626
ABSTRACT:
Machines and systems for removing materials from microfeature workpieces using fixed-abrasive mediums. One embodiment of a method for removing material from a microfeature workpiece comprises rubbing the workpiece against a surface of a fixed-abrasive medium having a matrix and abrasive particles attached to the matrix, and sensing a parameter indicative of frictional force at an interface between the workpiece and the surface of the fixed-abrasive medium. This method continues by moving at least one of the workpiece and the fixed-abrasive medium relative to each other in a direction transverse to the interface based on the parameter. For example, the workpiece and/or the fixed-abrasive medium can be vibrated or oscillated to reduce the frictional force and/or maintain a desired relative velocity between the workpiece and the fixed-abrasive medium.
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Ackun Jr. Jacob K
Micro)n Technology, Inc.
Perkins Coie LLP
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