4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Guy F. Hudson

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Apparatus and methods for selective removal of material from...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Apparatus for controlling PH during planarization and...

Abrading – Machine – Combined
Reexamination Certificate

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Apparatus for selective removal of material from wafer...

Brushing – scrubbing – and general cleaning – Machines – With air blast or suction
Reexamination Certificate

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Apparatus for selective removal of material from wafer...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Contact integration article

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-88874

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