4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Guojing Zhang

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Absorber layer for EUV

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Enhanced inspection of extreme ultraviolet mask

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Enhanced inspection of extreme ultraviolet mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Extreme ultraviolet mask with improved absorber

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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High performance EUV mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-920628

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