4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Günther Ruhl

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Method for compensating for scatter/reflection effects in...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Plasma-etching process for molybdenum silicon nitride layers...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Process for the plasma etching of materials not containing...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2731013

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