4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Gun Young Jung

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Apparatus for imprinting lithography and fabrication thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With specified crystal plane or axis
Reexamination Certificate

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Increasing adhesion in an imprinting procedure

Coating processes – With pretreatment of the base – Preapplied reactant or reaction promoter or hardener
Reexamination Certificate

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Method for fabricating a nano-imprinting mold

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2429942

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