4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Greg Goodwin

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Die-based in-fab process monitoring and analysis system for...

Semiconductor device manufacturing: process – With measuring or testing
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Method and apparatus for control of photoresist plasma removal

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method and apparatus for controlling photolithography...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method and apparatus for performing final critical dimension...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Profile ID: LFUS-PAI-P-2053354

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