Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate
2005-12-20
2005-12-20
Rachuba, M. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
By optical sensor
C451S041000, C451S285000
Reexamination Certificate
active
06976901
ABSTRACT:
Embodiments of the invention provide methods and apparatus for in situ feature height measurement of an object being planarized. In one embodiment, a method of planarizing an object comprises polishing a surface of the object to be planarized using a polishing pad having a cavity; and directing an incident light from the cavity of the polishing pad to optically measure feature heights of surface features on the surface of the object to obtain measurement data during the polishing of the surface using the polishing pad. The feature heights are relative height differences of the features measured by directing the incident light at the surface of the object from the cavity and observing a reflected light intensity of a reflected light from the features on the surface to the cavity.
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“The Ellipsometer”; http://ece-www.colorado.edu/.about.bart/book/ellipsom.htm.
Barbour Greg
Halley David G.
Rachuba M.
Strasbaugh
Townsend and Townsend / and Crew LLP
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