4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Goetz Teschner

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Apparatus for coating a substrate with electrically nonconductiv

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Apparatus for coating a substrate, especially with electrically

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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