Apparatus for coating a substrate with electrically nonconductiv

Details Apparatus for coating a substrate with electrically nonconductiv Apparatus for coating a substrate with electrically nonconductiv

1993-12-01

1995-05-16

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419212, 20429819, C23C 1434

Patent

active

054157579

ABSTRACT:
Method and an apparatus for coating a substrate from electrically conductive targets (3, 4) in a reactive atmosphere, comprising a power source (12, 13, 14) which is connected to cathodes (1, 2) disposed in an evacuable coating chamber (15) and cooperating electrically with the targets (3, 4), two anodes (5, 6) electrically separated from one another and from the sputtering chamber (15) being provided, which lie in a plane between the cathodes (1, 2) and the substrate (7), the two output terminals (12a, 12b) of the secondary winding of a transformer (12) connected, with interposition of a choke coil (14), to a medium frequency generator (13) being connected each to a cathode (1 and 2, respectively) via two supply lines (20, 21) and the two supply lines (20, 21) being connected via a branch line (22) into which a resonant circuit is inserted, and each of the two supply lines (20, 21) being coupled both via a first network (16 and 17, respectively) to the coating chamber and via a corresponding second network (8 and 9, respectively) to the particular anode (5 and 6, respectively).

REFERENCES:
patent: 2853655 (1958-09-01), Harders et al.
patent: 3860507 (1975-01-01), Vossen, Jr.
patent: 4792730 (1988-12-01), Mintchev et al.
patent: 4887005 (1989-12-01), Rough et al.
patent: 4956070 (1990-09-01), Nakada et al.
patent: 5082546 (1992-01-01), Szczyrbowski et al.
patent: 5126032 (1992-06-01), Szczyrbowski et al.
patent: 5169509 (1992-12-01), Latz et al.
patent: 5240584 (1993-08-01), Szczyrbowski et al.

Affiliated with

Also associated with

Rating

Apparatus for coating a substrate with electrically nonconductiv does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for coating a substrate with electrically nonconductiv, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for coating a substrate with electrically nonconductiv will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-635789