4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Glenn L. Nobinger

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Method of forming a fluorinated silicon oxide layer using plasma

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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Organic preclean for improving vapor phase wafer etch uniformity

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Profile ID: LFUS-PAI-P-1796144

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