4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Recycling, regenerating, or rejunevating etchant

Gim-Syang Chen

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Cleaning and drying method and apparatus

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Method of manufacturing a solar cell using a pre-cleaning...

Semiconductor device manufacturing: process – Having integral power source
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Method of processing substrates using pressurized mist...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Process and apparatus for removal of photoresist from...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Process sequence for photoresist stripping and/or cleaning...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
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