4. Optical: systems and elements
  5. Lens
  6. With field curvature shaping

Gerhard Ittner

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Illuminating arrangement for a projection microlithographic expo

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Illuminating arrangement for a projection microlithographic...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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REMA objective for microlithographic projection exposure systems

Optical: systems and elements – Lens – With field curvature shaping
Patent

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Profile ID: LFUS-PAI-P-1481857

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