4. Optical waveguides
  5. With optical coupler
  6. Plural

Geoffrey Hayward

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Apparatus for automatically loading a furnace with semiconductor

Material or article handling – Chamber of a type utilized for a heating function and... – Including driven device and/or inclined flow path to carry...
Patent

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Generalized resonant coupler filters

Optical waveguides – With optical coupler – Plural
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Oven for the heat treatment of semiconductor substrates

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Profile ID: LFUS-PAI-P-703775

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