4. Semiconductor device manufacturing: process
  5. Bonding of plural semiconductor substrates

Gaius Gillman Fountain, Jr.

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3D IC method and device

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Chip mounted on chip
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Method for low temperature bonding and bonded structure

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
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Method for low temperature bonding and bonded structure

Metal treatment – Barrier layer stock material – p-n type – With contiguous layers of different semiconductive material
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Method for low temperature bonding and bonded structure

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate

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Method for low temperature bonding and bonded structure

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate

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