4. Abrading
  5. Machine
  6. Rotary tool

G. Hugo Urbina

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Apparatus and method for semiconductor planarization

Abrading – Abrading process – Utilizing fluent abradant
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Method and system to increase delivery of slurry to the surface

Abrading – Machine – Rotary tool
Patent

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Profile ID: LFUS-PAI-P-1717417

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