Method and system to increase delivery of slurry to the surface

Details Method and system to increase delivery of slurry to the surface Method and system to increase delivery of slurry to the surface

1996-01-19

1999-05-04

Till, Terrence

Abrading

Machine

Rotary tool

451 41, 15102, 15230, B24B 2902

Patent

active

058997997

ABSTRACT:
Grooves are cut into an under pad of a polishing pad assembly formed by an under pad and an over pad. The grooves cause channeling of the over pad so that slurry received on the polishing face of the pad assembly is delivered across the pad assembly's surface in a controlled fashion.

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