4. Synthetic resins or natural rubbers -- part of the class 520 ser
  5. Synthetic resins
  6. From phenol, phenol ether, or inorganic phenolate

Fumitake Kaneko

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Agent for forming coating for narrowing patterns and method...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Chemical-amplification-type negative resist composition

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Chemical-sensitization resist composition

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Chemical-sensitization resist composition

Organic compounds -- part of the class 532-570 series – Organic compounds – Cyano single bonded and nitrogen or phosphorus double bonded...
Reexamination Certificate

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Method for reducing pattern dimension in photoresist layer

Coating processes – Nonuniform coating
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Profile ID: LFUS-PAI-P-524286

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