4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

FTS Corporation

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Box-shaped facing-targets sputtering apparatus and method...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Facing-targets-type sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Facing-targets-type sputtering apparatus and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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