4. Computer-aided design and analysis of circuits and semiconductor
  5. Nanotechnology related integrated circuit design

Franz Xaver Zach

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Method for interlayer and yield based optical proximity...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Method for interlayer and yield based optical proximity...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Method for measuring and verifying stepper illumination

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2888967

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