Method for measuring and verifying stepper illumination

Details Method for measuring and verifying stepper illumination Method for measuring and verifying stepper illumination

2007-05-29

2007-05-29

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000

Reexamination Certificate

active

11141803

ABSTRACT:
An apparatus and method for characterizing an illumination pupil of an exposure tool comprises forming a plurality of pinhole test patterns at a plurality of test site locations to facilitate locating test pattern edges for extracting therefrom the illumination pupil characteristics of the exposure tool.

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