4. Data processing: measuring, calibrating, or testing
  5. Measurement system
  6. Orientation or position

Fransiscus Godefridus Casper Bijnen

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Alignment method, method of measuring front to backside...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment tool, a lithographic apparatus, an alignment...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Calibration methods, calibration substrates, lithographic...

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate

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Measurement substrate, substrate table, lithographic...

Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2383875

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