Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate
2005-08-30
2005-08-30
Young, Christopher G. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
C430S030000, C355S053000, C355S077000, C356S399000, C356S400000, C356S401000, C438S401000
Reexamination Certificate
active
06936385
ABSTRACT:
To calibrate a front-to-backside alignment system a transparent calibration substrate with reference markers on opposite sides is used. A plane plate is inserted to displace the focal position of the alignment system from the top to bottom surface of the calibration substrate.
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X-Ray Lithography Mask With Visible Light Transmitting Areas, IBM Technical Disclosure Bulletin, Oct. 1989, Vo. 32, No. 5A. pp. 240-241.
Bijnen Fransiscus Godefridus Casper
Gui Cheng-Qun
Lof Joeri
Van Buel Henricus Wilhelmus Maria
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Young Christopher G.
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