Alignment tool, a lithographic apparatus, an alignment...

Details Alignment tool, a lithographic apparatus, an alignment... Alignment tool, a lithographic apparatus, an alignment...

2007-03-20

2007-03-20

Luu, Thanh X. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C356S401000

Reexamination Certificate

active

10648785

ABSTRACT:
An optical element is placed in the alignment beam during alignment. The optical element serves to focus the alignment beam onto the substrate alignment mark when it is at a different focal length from the front surface of the substrate.

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