4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Robot control

Fan-Lin Lu

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Apparatus and method for positioning a cassette pod onto a...

Material or article handling – Elevator or hoist and loading or unloading means therefor – Grab
Reexamination Certificate

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Method of calibrating a wafer edge gripping end effector

Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
Reexamination Certificate

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Optical wafer presence sensor system

Optics: measuring and testing – Photometers – Photoelectric
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Profile ID: LFUS-PAI-P-2685406

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