Material or article handling – Elevator or hoist and loading or unloading means therefor – Grab
Reexamination Certificate
2005-02-01
2005-02-01
Keenan, James W. (Department: 3652)
Material or article handling
Elevator or hoist and loading or unloading means therefor
Grab
C414S217100, C414S805000, C414S940000
Reexamination Certificate
active
06848882
ABSTRACT:
An apparatus and a method for positioning a cassette pod onto a loadport by an overhead hoist transport system are described. The apparatus includes a vertical front panel of a process machine equipped with a docking opening therein, a loadport stage extending horizontally from the vertical front panel, a loadport situated on the loadport stage, at least two back guiding plates situated on the back of the loadport, at least two side guiding plates with one situated on each side of the loadport, a front guiding plate situated on the front side of the loadport, and a clamp positioner for guiding the position of an OHT clamp during an unloading operation of the cassette pod. The two halves of the clamp positioner move sideways away from each other to allow the cassette pod to pass therethrough during a loading operation.
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Chen Ho-Jen
Chung Ko-Chin
Lu Fan-Lin
Tseng Yu-Tan
Keenan James W.
Taiwan Semiconductor Manufacturing Co. Ltd
Tung & Associates
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